What is Ion Milling? AJA International
The top of the Cu is patterned with a photoresist mask designed to leave behind an array of Cu dots. When the ion milling begins, secondary Cu ions are detected by the SIMS detector as having a significant intensity. As the milling process starts to punch through the Cu top layer and into the SiO2, the intensity of Cu starts to diminish and the presence of SiO2 is first detected .